Tech Sector Manufacturing

Technology manufacturing gas cleaning systems

ERG supplies engineered gas cleaning systems for microelectronic, manufacture of industrial lasers, speciality gas and optical fibre manufacturing plants, helping operators control aggressive gas and particulate emissions while meeting stringent facility and permit requirements.

Our purpose‑designed air pollution control systems are configured for storage tanks, CVD tools, LEV systems and process vent lines, and each package is engineered to suit the specific application and supplied with a process guarantee.

Applications in technology sector manufacturing

ERG’s abatement packages are typically installed to treat vents from storage tanks, CVD machines and LEV vent lines. In many cases, a skid‑mounted scrubber package is required, though ERG can also arrange site installation and commissioning.

Typical contaminants which we treat include:

  • Acid gases – HF, F₂, HCl, Cl₂, HBr, Br₂, COS, HCN, SO₂
  • Basic gases – NH₃, etc.
  • Silicates – SiO₂, H₂SiF₆, SiF₄, SiCl₄, etc.
  • Dust and aerosols – 100 to <1 micron particle sizes, mechanically and chemically generated
  • VOCs – MEK, nMP, ethyl acetate, etc.

 

ERG has particular experience treating halogenated semi‑metals (BCl₃, SiCl₄, SiF₄, etc.) where difficult‑to‑handle gelatinous or solid precipitates form on contact with the scrubbing liquor, leading to potential for system blockage.

Gas cleaning technologies for microelectronics and speciality gases

Our vent abatement systems are based on one or more of the following technologies. Each package is bespoke, designed and manufactured to the specific project requirements.

  • V‑tex® scrubbers – for acid gases, some dusts and some VOCs, especially for applications where clogging is a possibility
  • Packed tower scrubbers – for acid gases, basic gases, some dusts and some VOCs
  • Venturi scrubbers – for high concentration or fine (sub‑micron) dust
  • Carbon filters – for VOCs and solvent abatement
  • Quench systems – for adiabatically cooling high‑temperature gas for further wet scrubbing
  • Thermal oxidation – for waste solvents and VOC‑rich vent gases

 

These technologies are selected to provide reliable removal of corrosive gases, particulates and VOCs, protecting downstream fans, stacks and process equipment in technology manufacturing environments.

Meeting exacting technology sector specifications

ERG’s design and project management teams are highly experienced at delivering packaged plant which meets the technology sector’s needs. All design and procurement is managed according to our ISO 9001 procedures. All manufacturing and assembly is to the agreed codes and project specifications, managed through and certified against the project Quality and Inspection & Test Plans.

All equipment is fully certified and documented in accordance with applicable European Standards, and CE marked accordingly. Vessels can be supplied to BS EN 13121, PD 5500 or ASME VIII as appropriate, and packages CE marked to the Pressure Equipment (2014/68/EU) and ATEX (2014/34/EU) Directives depending on the specification requirements.

Choice of materials

Every ERG package has materials selected to match the specification. All systems are mechanically designed for the operating and design pressures and temperatures. 

Common materials include plastics, GRPs and stainless steels, with alternatives available to suit specific gas compositions, temperatures and cleanroom requirements.

ERG package scope of supply

ERG is a specialised scrubbing supplier. Our typical scope includes:

  • Project management including customer design reviews, progress reporting, equipment interface agreement, programme management, site activities co‑ordination and documentation packages
  • Process design and technical submission – heat and mass balance, P&ID, control philosophy and technical schedules
  • Detailed mechanical and electrical design – model and/or package General Arrangement drawings, civils requirements, site wiring details, interface details, off‑loading and installation details
  • Sub‑supplier procurement, quality assurance and expediting – vessels, pipework and valves, pumps, fans, heat exchangers, instrumentation, control panels or local JBs, access steelwork and pressure protection devices
  • Package assembly including full pipework and wiring, factory testing and certification
  • Delivery

Installation and commissioning are also available if required – phone support during this phase can be arranged if preferred. Plastic and GRP vessels are manufactured by ERG (Plastic Fabrication) with skid assembly and testing managed at our facility in West Sussex.

Operational peace of mind

Every ERG abatement package carries a performance guarantee, so as an operator you can be sure the equipment will meet the process requirements. Our standard 12‑month or extended warranty guarantees the mechanical and electrical parts against defects, and our Maintenance department can assist with routine, shut‑down or emergency maintenance.

Our clients

ERG’s customers in this sector include technology manufacturers, microelectronics and optical fibre producers and speciality gas users. Contracts can be placed direct by the site owners, although we also frequently work through main contractors.

Industrial gas cleaning/Thermal systems

System Maintenance

Odour control

Plastic-GRP Fabrication